Input Requirements LiNbO 3 Among various device geometries, photonic-crystal nanoresonators are particularly beneficial in this regard, given their exceptional capability of controlling light confinement and lightmatter interactions on the sub-wavelength scale. Opt. The devices were fabricated on a 300-nm-thick x-cut single-crystalline LN thin film bonded on a 3-m silicon dioxide layer sitting on a silicon substrate (from NanoLN). Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. When the modulation frequency is increased to 2.0GHz greater than the cavity linewidth, the cavity is too slow to follow the electro-optic modulation, which results in the frequency conversion of photons into sidebands with frequency separation equal to the modulation frequency. Marpaung, D., Yao, J. Wlbern, J. H. et al. Photonics 11, 5357 (2017). Rao, A. Shen, Y. et al. The research was co-authored by Dylan Renaud, Rebecca Cheng, Linbo Shao. Nat. Liang, H., Luo, R., He, Y., Jiang, H. & Lin, Q. increased the EO modulation efficiency to a voltage-length product of 1.75 Vcm using a shallowly etched lithium niobate waveguide. Liu, J. et al. Rev. Ogiso, Y. et al. Nozaki, K. et al. 26, 13321335 (2014). Optica 5, 233236 (2018). Ultra-low power fiber-coupled gallium arsenide photonic crystal cavity electro-optic modulator. a Recorded transmission spectra of the \({\mathrm{{TE}}}_{01}^{0}\) cavity mode with RF driving signal at seven different powers from 0 to 12mW, with a power step of 2mW, modulated at 0.6GHz. The equipment in the highlighted dashed box is used for characterizing the performance of electro-optic modulation. volume11, Articlenumber:4123 (2020) Appl. Kues, M. et al. Here, we fabricate a multimode microring resonator with an intrinsic Q of 6 106, which exhibits a propagation loss 50 times lower than that of a single-mode LN microring fabricated under the same process. In this research, we used all the nano-fabrication tricks and techniques learned from previous developments in integrated lithium niobate photonics to overcome those challenges and achieve the goal of integrating a high-powered laser on a thin-film lithium niobate platform., Harvards Office of Technology Development. Phys. Thorlabs free-space electro-optic (EO) amplitude and phase lithium niobate modulators combine our experience with crystal growth and electro-optic materials. It has a bias control section that integrates with a tap monitor for stable operation. Google Scholar. Lithium niobate (LiNbO3) modulator can be regarded as a technology platform that can add values to optical networks and is suitable for addressing many issues. conceived the experiment. Google Scholar. The photonic-crystal hole structure was patterned with ZEP-520A positive resist via electron-beam lithography, which was then transferred to the LN layer with an Ar+ plasma milling process to etch down the full 300-nm depth. Optica 1, 112118 (2014). Rep. 7, 46313 (2017). For example, the capacitance of our device can be significantly decreased since the majority of the metallic parts in the current devices are used for coupling the RF driving signal, which can be removed in a future on-chip integration design. Zhou, B., Li, E., Bo, Y. 27), which is about 22fJ per bit in our EOM. Lithium niobate photonic crystal wire cavity: realization of a compact electro-optically tunable filter. Express 22, 2862328634 (2014). The region highlighted in red is the electrode used to drive the photonic-crystal nanoresonator. Quant. a Schematic of the LN photonic-crystal EOM. Now, researchers from the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) in collaboration with industry partners at Freedom Photonics and HyperLight Corporation, have developed the first fully integrated high-power laser on a lithium niobate chip, paving the way for high-powered telecommunication systems. Although the breaking of the mirror symmetry along the normal direction of the device plane considerably alters the band gap of the photonic crystal (Fig. Lu, H. et al. Reed, G. T., Mashanovich, G., Gardes, F. Y. Top. Thin-film lithium niobate (LN) has recently emerged as a strong contender owing to its high intrinsic electro-optic (EO) efficiency, industry-proven performance, robustness, and, importantly, the rapid development of scalable fabrication techniques. The fully on-chip design achieves a full-swing extinction ratio of 11.5dB. Laser. Here the modulator is analyzed in a dual-drive design shown in Figure 1 (where V1 = -V2). Advanced optical modulation formats. Express 20, 29742981 (2012). Difficulty in etching lithium niobate (LN) results in a relatively high propagation loss, which necessitates sophisticated processes to fabricate high-quality factor (Q) microresonators. The blue open circles show the dielectric and air bands. 2, red box) is used primarily for impedance matching to the large metal pad for probe contact, which can be decreased to 3m for a fully on-chip operation36. & Thomson, D. J. The pure linear electro-optic tuning shown in Fig. Express 27, 1985219863 (2019). We believe this is the first LN EOM ever reported with such combined device characteristics and modulation performance. Boes, A., Corcoran, B., Chang, L., Bowers, J. With these devices, we are able to demonstrate efficient electrical driving of high-Q cavity mode in both adiabatic and non-adiabatic regimes and to observe transition in between. IEEE J. Sel. On-chip generation of high-dimensional entangled quantum states and their coherent control. J. Lightwave Technol. To maximize the electro-optic interaction, we utilize a partially etched structure with a rib-waveguide-like cross-section, leaving a 150-nm-thick wing layer for the electrodes to sit on (Fig. Fortier, T. M. et al. Opt. Opt. Electro-optic modulators translate high-speed electronic signals into the optical domain and are critical components in modern telecommunication networks1,2 and microwave-photonic systems3,4. With a balance between the optical Q and the electro-optic tuning efficiency, we adopt a design with a 2.1-m gap and a 150-nm-thick wing layer to achieve the performance demonstrated in this paper, which is highlighted in red in Fig. IEEE 94, 952985 (2006). The demonstration of energy efficient and high-speed EOM at the wavelength scale paves an important step for device miniaturization and high-density photonic integration on the monolithic LN platform, which is expected to find broad applications in communication, computing, microwave signal processing, and quantum photonic information processing. Optical and RF characterization of a lithium niobate photonic crystal modulator. The gray regions represents the 3-dB bandwidth limit for two devices, respectively, and the dashed line indicates the 3-dB limit of S21. A hybrid waveguide with a lithium niobate thin film bonded on a silicon wire is employed. Laser Photon. 1 Half-wave voltages of devices with different active lengths. Gap denotes the spacing between the gold electrode and the LN cavity, and tw denotes the thickness of the waveguide wing layer. 9, 525528 (2015). Science 298, 14011403 (2002). In the meantime, to ensure continued support, we are displaying the site without styles Here we overcome these limitations and demonstrate monolithically integrated lithium niobate electro-optic modulators that feature a CMOS-compatible drive voltage, support data rates up to 210. b, c Eye diagrams of the photonic-crystal EOM output, measured with 271 NRZ PRBS with a driving voltage of Vpp=2V. The laser wavelength was locked at half wave into the cavity resonance. This Perspective discusses and compares several different approaches to the design of high-bandwidth, low-voltage electro-optic devices, such as Mach-Zehnder modulators, made using thin-film lithium niobate (TFLN) and strategies for their incorporation as part of a larger photonic integrated circuit (PIC). Photon. ADS Zhang, M. et al. Li, M., Ling, J., He, Y. et al. After the residue removal, we used diluted hydrofluoric acid to undercut the buried oxide layer to form a suspended photonic-crystal membrane structure (Fig. and S.C. carried out the device characterization. A fully photonics-based coherent radar system. Opt. The detector output was recorded either by a microwave network analyzer (Keysight N5235B) for characterizing the modulation bandwidth or by a sampling oscilloscope module (Keysight 54754A) to record the eye diagram of the switching signal. The high efficiency of electro-optic tuning together with the high optical quality of the EOM resonator enables efficient electrical driving of the optical mode into different dynamic regimes. Generation of ultrastable microwaves via optical frequency division. c Detailed spectrum (blue) with RF driving signal at 2.0GHz with a power of 16mW. In this contribution, we simulate, design, and experimentally demonstrate an integrated optical isolator based on spatiotemporal modulation in the thin-film lithium niobate on an insulator waveguide platform. Opt. https://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=3948. A second exposure is then performed to define the waveguide structure, which is partially etched by 150nm with the same process. 6a, with a broadened spectral linewidth dependent on the driving power. Broadband electro-optic frequency comb generation in a lithium niobate microring resonator. | 617-496-1351 | lburrows@seas.harvard.edu, Method can depict holograms viewable from any angle as if physically present with continuous depth, Nanofabrication technique, using holes to create vacuum guides, breaks a barrier in optics, Applied Physics, Optics / Photonics, Quantum Engineering, By detecting nanoscopic heat changes inside cells, first-of-their-kind sensors reveal how living systems use energy, Applied Physics, Bioengineering, Health / Medicine, Materials, 150 Western Ave, Allston, MA 02134 (Credit: Second Bay Studios/Harvard SEAS). The individual column at the left of each plot indicates the case when tw=0m and gap=2.5m, for a device with full surrounding air cladding. HR00112090012. Nature (Nature) Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth. Extended Data Fig. These authors contributed equally: Cheng Wang, Mian Zhang, John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA, USA, Cheng Wang,Mian Zhang,Maxime Bertrand,Amirhassan Shams-Ansari&Marko Lonar, Department of Electronic Engineering, City University of Hong Kong, Kowloon, Hong Kong, China, Xi Chen,Sethumadhavan Chandrasekhar&Peter Winzer, LP2N, Institut dOptique Graduate School, CNRS, University of Bordeaux, Talence, France, Department of Electrical Engineering and Computer Science, Howard University, Washington, DC, USA, You can also search for this author in Numerical simulations show that the device exhibits a small capacitance C of C=~22fF, which is more than one order of magnitude smaller than other LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26. Cai, L. et al. Optica 4, 15361537 (2017). Provided by the Springer Nature SharedIt content-sharing initiative. Shao, L. et al. Quantum Electron. Miller, D. A. Ozaki, J., Ogiso, Y. Input requirements, test setups, and mounting instructions will be covered. Recently, there have been significant advance in high-Q LN photonic-crystal nanoresonators43,44,45,46, which led to the demonstration of intriguing phenomena and functionalities such as photorefraction quenching43, harmonic generation44, piezo-optomechanics45, and all-optical resonance tuning46. We propose and demonstrate a Mach-Zehnder modulator in Z-cut lithium niobate thin film (LNTF) with a vertical electric field structure. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. Shakoor, A. et al. a, b, Schematics of the cross-sections of thin-film (a) and conventional (b) LN modulators. Liu et al. Energy efficiency, operation speed, and device dimension are thus crucial metrics underlying almost all current developments of photonic signal processing units. Herein, we review the progress in microstructure and domain. As a result, a full air cladding would strongly limits the electro-optic coupling, leading to a low efficiency of electro-optic tuning as indicated by the individual black column in Fig. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages, Sub-1 Volt and high-bandwidth visible to near-infrared electro-optic modulators, Spectral control of nonclassical light pulses using an integrated thin-film lithium niobate modulator, Single-photon detection and cryogenic reconfigurability in lithium niobate nanophotonic circuits, Femtojoule femtosecond all-optical switching in lithium niobate nanophotonics, Extending the spectrum of fully integrated photonics to submicrometre wavelengths, Ultra-low-power second-order nonlinear optics on a chip, Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications, Femtofarad optoelectronic integration demonstrating energy-saving signal conversion and nonlinear functions, http://creativecommons.org/licenses/by/4.0/, Controlling single rare earth ion emission in an electro-optical nanocavity, Photonic van der Waals integration from 2D materials to 3D nanomembranes, Hydrothermal growth of KTiOPO4 crystal for electro-optical application, High-performance polarization management devices based on thin-film lithium niobate. supervised the project. Micro-transfer printing of thin-film lithium niobate offers a solution, but suspending large areas of thin films for long interaction lengths and high-Q resonators is challenging, resulting in a low transfer . Recently, thin-film monolithic LN11,12 emerges as a promising platform, where low-loss and high-quality photonic integration together with the strong Pockels effect enables superior modulation performance13,14,15,16,17,18,19,20,21,22,23,24,25,26, showing great potential as an excellent medium for photonic integrated circuits and future photonic interconnect. Topics: The elliptical hole has dimensions of hx=270nm and hy=490nm, and a fully etched depth of 300nm. Top. Here, we report an EO lithium niobate metasurface mediated by topological corner states. Express 23, 2352623550 (2015). Essentially, only the 10-m long point-defect cavity requires electric driving to achieve electro-optic modulation. The authors declare no competing interests. OBrien, J. L. Optical quantum computing. Laser Photonics Rev. The energy efficiency of the LN photonic-crystal EOM can be further improved since our current devices are not optimized. M.L., J.L., and Y.H. Figure5b shows a clear linear dependence of the induced resonance wavelength shift on the applied voltage, from which we obtained a tuning slope of 16.0pmV1 (corresponding to a frequency tuning slope of 1.98GHzV1), close to our design. 14 April 2023, Light: Science & Applications The cavity resonance exhibits a coupling depth of 93%, corresponding to a full-swing extinction ratio of 11.5dB. 41, 57005703 (2016). Nature 562, 101104 (2018). The electrodes are designed to be placed close to the photonic-crystal resonator (Fig. Nature 556, 483486 (2018). High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate. Nat. In the current EOMs shown above, light is coupled into and out of the EOMs via a same side of the cavity, which is not convenient in practice since a circulator is required to separate the modulated light for the laser input. The measured electrical BER is 3.6105, limited by the signal distortion from the electronic circuit. Q.L. Although attempts have been made to explore the electro-optic effect in LN photonic crystals40,41,42, the low device quality and poor optoelectronic integration unfortunately limit seriously the operation speed. Ultrafast electro-optic light with subcycle control. Hybrid silicon photonic-lithium niobate electro-optic MachZehnder modulator beyond 100 GHz. This value is the smallest switching energy ever reported for LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, clearly showing the high energy efficiency of our devices. Department of Electrical and Computer Engineering, University of Rochester, Rochester, NY, 14627, USA, Mingxiao Li,Jingwei Ling,Yang He&Qiang Lin, Institute of Optics, University of Rochester, Rochester, NY, 14627, USA, You can also search for this author in Opt. High-speed Pockels modulation and second-order nonlinearities are key components in optical systems, but CMOS-compatible platforms like silicon and silicon nitride lack these capabilities. This can be changed simply by engineering the photonic-crystal mirror on the other side to function as the output port. The demonstration of energy efficient and high-speed electro-optic modulation at the wavelength scale paves a crucial foundation for realizing large-scale LN photonic integrated circuits that are of immense importance for broad applications in data communication, microwave photonics, and quantum photonics. 1f), so as to take the advantage of the largest electro-optic component r33 of LN. ADS Zhang, M., Wang, C., Cheng, R., Shams-Ansari, A. and JavaScript. Tanabe, T., Nishiguchi, K., Kuramochi, E. & Notomi, M. Low power and fast electro-optic silicon modulator with lateral p-i-n embedded photonic crystal nanocavity.
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